Editorial Reviews
Editorial ReviewsBook Description
This book covers all aspects of Physical Vapor Deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to postdepostion processing.
Product Description
This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications.
The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired.
The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.
About the Author
Donald M. Mattox, together with his wife, Vivienne, are the founders of Management Plus, Inc. He is also the Technical Director of the Society of Vacuum Coaters (SVC). Mattox writes a monthly column on PVD processing and vacuum/plasma technology for the American Electroplating and Surface Finishing (AESP) Society journal, Plating and Surface Finishing. Since 1992, he has also been Technical Director of the Association of Vacuum Equipment Manufacturers (AVEM). Mattox was a staff member at Sandia National Laboratories for twenty-eight years. He is the inventor of the "ion plating" process. In addition, he was past president of the American Vacuum Society, Chairman of the Thin Film Division, Member of the Board of Directors, and associate editor of the Journal of Vacuum Science and Technology. Mattox is author of over 100 journal publications and several book chapters.
Product Details
- Hardcover: 949 pages
- Publisher: Noyes Publications; 1 edition (March 1, 1998)
- Language: English
- ISBN-10: 0815514220
- ISBN-13: 978-0815514220